10/20/2010	1:40:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/20/2010	1:40:04 PM	Recipe started at 1:40 PM
10/20/2010	1:40:04 PM	H2 valve closed
10/20/2010	1:40:04 PM	BCl3 valve closed
10/20/2010	1:40:04 PM	PH3 valve closed
10/20/2010	1:40:04 PM	SiCl4 pre valve closed
10/20/2010	1:40:04 PM	SiCl4 post valve closed
10/20/2010	1:40:04 PM	Main Vac valve closed
10/20/2010	1:40:04 PM	Bypass valve closed
10/20/2010	1:40:04 PM	Bubbler valve closed
10/20/2010	1:40:04 PM	Helium valve opened
10/20/2010	1:40:04 PM	Helium MFC set to  500.000000
10/20/2010	1:40:04 PM	H2 MFC set to  0.000000
10/20/2010	1:40:04 PM	BCl3 MFC set to  0.000000
10/20/2010	1:40:04 PM	PHl3 MFC set to  0.000000
10/20/2010	1:40:04 PM	SiCl4 MFC set to  0.000000
10/20/2010	1:40:04 PM	Bypass solenoid MFC set to  0.000000
10/20/2010	1:40:04 PM	Tube furnace set to 0
10/20/2010	1:40:53 PM	Run aborted at 1:40 PM
10/20/2010	1:40:53 PM	Helium valve closed
10/20/2010	1:40:53 PM	H2 valve closed
10/20/2010	1:40:53 PM	BCl3 valve closed
10/20/2010	1:40:53 PM	PH3 valve closed
10/20/2010	1:40:53 PM	SiCl4 pre valve closed
10/20/2010	1:40:53 PM	SiCl4 post valve closed
10/20/2010	1:40:53 PM	Bypass valve closed
10/20/2010	1:40:53 PM	Main Vac valve closed
10/20/2010	1:40:53 PM	Bubbler valve closed
10/20/2010	1:40:53 PM	Helium MFC set to  0.000000
10/20/2010	1:40:53 PM	H2 MFC set to  0.000000
10/20/2010	1:40:53 PM	BCl3 MFC set to  0.000000
10/20/2010	1:40:53 PM	PHl3 MFC set to  0.000000
10/20/2010	1:40:53 PM	SiCl4 MFC set to  0.000000
10/20/2010	1:40:53 PM	Tube furnace set to 0
10/20/2010	1:40:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/20/2010	1:40:57 PM	Bypass valve opened
10/20/2010	1:40:57 PM	Bypass valve closed
10/20/2010	1:40:58 PM	Main Vac valve opened
10/20/2010	1:40:58 PM	Main Vac valve closed
10/20/2010	1:41:01 PM	Helium valve opened
10/20/2010	1:41:03 PM	Helium valve closed
10/20/2010	2:12:05 PM	Bypass valve opened
10/20/2010	2:12:05 PM	Bypass valve closed
10/20/2010	2:12:07 PM	Helium valve opened
10/20/2010	2:12:10 PM	Helium MFC set to  0.000000
10/20/2010	2:12:11 PM	Helium valve closed
10/20/2010	2:12:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/20/2010	2:12:13 PM	Recipe started at 2:12 PM
10/20/2010	2:12:14 PM	H2 valve closed
10/20/2010	2:12:14 PM	BCl3 valve closed
10/20/2010	2:12:14 PM	PH3 valve closed
10/20/2010	2:12:14 PM	SiCl4 pre valve closed
10/20/2010	2:12:14 PM	SiCl4 post valve closed
10/20/2010	2:12:14 PM	Main Vac valve closed
10/20/2010	2:12:14 PM	Bypass valve closed
10/20/2010	2:12:14 PM	Bubbler valve closed
10/20/2010	2:12:14 PM	Helium valve opened
10/20/2010	2:12:14 PM	Helium MFC set to  500.000000
10/20/2010	2:12:14 PM	H2 MFC set to  0.000000
10/20/2010	2:12:14 PM	BCl3 MFC set to  0.000000
10/20/2010	2:12:14 PM	PHl3 MFC set to  0.000000
10/20/2010	2:12:14 PM	SiCl4 MFC set to  0.000000
10/20/2010	2:12:14 PM	Bypass solenoid MFC set to  0.000000
10/20/2010	2:12:14 PM	Tube furnace set to 0
10/20/2010	2:13:32 PM	Helium valve closed
10/20/2010	2:13:32 PM	H2 valve closed
10/20/2010	2:13:32 PM	BCl3 valve closed
10/20/2010	2:13:32 PM	PH3 valve closed
10/20/2010	2:13:32 PM	SiCl4 pre valve closed
10/20/2010	2:13:32 PM	SiCl4 post valve closed
10/20/2010	2:13:32 PM	Main Vac valve closed
10/20/2010	2:13:32 PM	Bypass valve closed
10/20/2010	2:13:32 PM	Bubbler valve closed
10/20/2010	2:13:32 PM	Helium MFC set to  0.000000
10/20/2010	2:13:32 PM	H2 MFC set to  0.000000
10/20/2010	2:13:32 PM	BCl3 MFC set to  0.000000
10/20/2010	2:13:32 PM	PHl3 MFC set to  0.000000
10/20/2010	2:13:32 PM	SiCl4 MFC set to  0.000000
10/20/2010	2:13:32 PM	Bypass solenoid MFC set to  0.000000
10/20/2010	2:13:32 PM	Tube furnace set to 0
10/20/2010	2:13:33 PM	Run finished at 2:13 PM
10/20/2010	2:13:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/20/2010	2:17:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/20/2010	2:17:38 PM	Recipe started at 2:17 PM
10/20/2010	2:17:38 PM	Helium valve closed
10/20/2010	2:17:38 PM	H2 valve closed
10/20/2010	2:17:38 PM	BCl3 valve closed
10/20/2010	2:17:38 PM	PH3 valve closed
10/20/2010	2:17:38 PM	SiCl4 pre valve closed
10/20/2010	2:17:38 PM	SiCl4 post valve closed
10/20/2010	2:17:38 PM	Main Vac valve closed
10/20/2010	2:17:38 PM	Bubbler valve closed
10/20/2010	2:17:38 PM	Bypass valve opened
10/20/2010	2:17:38 PM	Helium MFC set to  0.000000
10/20/2010	2:17:38 PM	H2 MFC set to  0.000000
10/20/2010	2:17:38 PM	BCl3 MFC set to  0.000000
10/20/2010	2:17:38 PM	PHl3 MFC set to  0.000000
10/20/2010	2:17:38 PM	SiCl4 MFC set to  0.000000
10/20/2010	2:17:38 PM	Bypass solenoid MFC set to  0.000000
10/20/2010	2:17:39 PM	Tube furnace set to 0
10/20/2010	2:18:26 PM	Helium valve closed
10/20/2010	2:18:26 PM	H2 valve closed
10/20/2010	2:18:26 PM	BCl3 valve closed
10/20/2010	2:18:26 PM	PH3 valve closed
10/20/2010	2:18:26 PM	SiCl4 pre valve closed
10/20/2010	2:18:26 PM	SiCl4 post valve closed
10/20/2010	2:18:26 PM	Bubbler valve closed
10/20/2010	2:18:26 PM	Main Vac valve opened
10/20/2010	2:18:26 PM	Bypass valve opened
10/20/2010	2:18:26 PM	Helium MFC set to  0.000000
10/20/2010	2:18:26 PM	H2 MFC set to  0.000000
10/20/2010	2:18:26 PM	BCl3 MFC set to  0.000000
10/20/2010	2:18:26 PM	PHl3 MFC set to  0.000000
10/20/2010	2:18:26 PM	SiCl4 MFC set to  0.000000
10/20/2010	2:18:26 PM	Bypass solenoid MFC set to  0.000000
10/20/2010	2:18:26 PM	Tube furnace set to 0
10/20/2010	2:18:26 PM	Run finished at 2:18 PM
10/20/2010	2:18:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/20/2010	3:23:39 PM	Helium valve opened
10/20/2010	3:23:42 PM	Helium MFC set to  100.000000
10/20/2010	3:29:44 PM	Helium valve closed
10/20/2010	3:29:46 PM	Helium MFC set to  0.000000
10/20/2010	3:31:40 PM	Recipe started at 3:31 PM
10/20/2010	3:31:40 PM	Helium valve closed
10/20/2010	3:31:40 PM	BCl3 valve closed
10/20/2010	3:31:40 PM	PH3 valve closed
10/20/2010	3:31:40 PM	SiCl4 pre valve closed
10/20/2010	3:31:40 PM	SiCl4 post valve closed
10/20/2010	3:31:40 PM	Main Vac valve closed
10/20/2010	3:31:40 PM	Bypass valve closed
10/20/2010	3:31:40 PM	Bubbler valve closed
10/20/2010	3:31:40 PM	H2 valve opened
10/20/2010	3:31:40 PM	Helium MFC set to  0.000000
10/20/2010	3:31:40 PM	H2 MFC set to  500.000000
10/20/2010	3:31:40 PM	BCl3 MFC set to  0.000000
10/20/2010	3:31:40 PM	PHl3 MFC set to  0.000000
10/20/2010	3:31:40 PM	SiCl4 MFC set to  0.000000
10/20/2010	3:31:40 PM	Bypass solenoid MFC set to  0.000000
10/20/2010	3:31:40 PM	Tube furnace set to 100
10/20/2010	3:33:02 PM	Helium valve closed
10/20/2010	3:33:02 PM	BCl3 valve closed
10/20/2010	3:33:02 PM	PH3 valve closed
10/20/2010	3:33:02 PM	SiCl4 pre valve closed
10/20/2010	3:33:02 PM	SiCl4 post valve closed
10/20/2010	3:33:02 PM	Main Vac valve closed
10/20/2010	3:33:02 PM	Bypass valve closed
10/20/2010	3:33:02 PM	H2 valve opened
10/20/2010	3:33:02 PM	Bubbler valve opened
10/20/2010	3:33:02 PM	Helium MFC set to  0.000000
10/20/2010	3:33:02 PM	H2 MFC set to  500.000000
10/20/2010	3:33:02 PM	BCl3 MFC set to  0.000000
10/20/2010	3:33:02 PM	PHl3 MFC set to  0.000000
10/20/2010	3:33:02 PM	SiCl4 MFC set to  0.000000
10/20/2010	3:33:02 PM	Bypass solenoid MFC set to  0.000000
10/20/2010	3:33:02 PM	Tube furnace set to 1000
10/20/2010	3:53:02 PM	Helium valve closed
10/20/2010	3:53:02 PM	PH3 valve closed
10/20/2010	3:53:02 PM	Main Vac valve closed
10/20/2010	3:53:02 PM	Bypass valve closed
10/20/2010	3:53:02 PM	H2 valve opened
10/20/2010	3:53:02 PM	BCl3 valve opened
10/20/2010	3:53:02 PM	SiCl4 pre valve opened
10/20/2010	3:53:02 PM	SiCl4 post valve opened
10/20/2010	3:53:02 PM	Bubbler valve opened
10/20/2010	3:53:02 PM	Helium MFC set to  0.000000
10/20/2010	3:53:02 PM	H2 MFC set to  500.000000
10/20/2010	3:53:02 PM	BCl3 MFC set to  10.000000
10/20/2010	3:53:02 PM	PHl3 MFC set to  0.000000
10/20/2010	3:53:02 PM	SiCl4 MFC set to  50.000000
10/20/2010	3:53:02 PM	Bypass solenoid MFC set to  0.000000
10/20/2010	3:53:03 PM	Tube furnace set to 1000
10/20/2010	4:05:03 PM	H2 valve closed
10/20/2010	4:05:03 PM	BCl3 valve closed
10/20/2010	4:05:03 PM	PH3 valve closed
10/20/2010	4:05:03 PM	SiCl4 pre valve closed
10/20/2010	4:05:03 PM	SiCl4 post valve closed
10/20/2010	4:05:03 PM	Main Vac valve closed
10/20/2010	4:05:03 PM	Bypass valve closed
10/20/2010	4:05:03 PM	Helium valve opened
10/20/2010	4:05:03 PM	Bubbler valve opened
10/20/2010	4:05:03 PM	Helium MFC set to  500.000000
10/20/2010	4:05:03 PM	H2 MFC set to  0.000000
10/20/2010	4:05:03 PM	BCl3 MFC set to  0.000000
10/20/2010	4:05:03 PM	PHl3 MFC set to  0.000000
10/20/2010	4:05:03 PM	SiCl4 MFC set to  0.000000
10/20/2010	4:05:03 PM	Bypass solenoid MFC set to  0.000000
10/20/2010	4:05:03 PM	Tube furnace set to 0
10/20/2010	4:23:26 PM	Helium valve closed
10/20/2010	4:23:26 PM	H2 valve closed
10/20/2010	4:23:26 PM	BCl3 valve closed
10/20/2010	4:23:26 PM	PH3 valve closed
10/20/2010	4:23:26 PM	SiCl4 pre valve closed
10/20/2010	4:23:26 PM	SiCl4 post valve closed
10/20/2010	4:23:26 PM	Main Vac valve closed
10/20/2010	4:23:26 PM	Bypass valve closed
10/20/2010	4:23:26 PM	Bubbler valve closed
10/20/2010	4:23:26 PM	Helium MFC set to  0.000000
10/20/2010	4:23:26 PM	H2 MFC set to  0.000000
10/20/2010	4:23:26 PM	BCl3 MFC set to  0.000000
10/20/2010	4:23:26 PM	PHl3 MFC set to  0.000000
10/20/2010	4:23:26 PM	SiCl4 MFC set to  0.000000
10/20/2010	4:23:26 PM	Bypass solenoid MFC set to  0.000000
10/20/2010	4:23:26 PM	Tube furnace set to 0
10/20/2010	4:23:27 PM	Run finished at 4:23 PM
10/20/2010	4:26:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/20/2010	4:26:28 PM	Recipe started at 4:26 PM
10/20/2010	4:26:28 PM	Helium valve closed
10/20/2010	4:26:28 PM	H2 valve closed
10/20/2010	4:26:28 PM	BCl3 valve closed
10/20/2010	4:26:28 PM	PH3 valve closed
10/20/2010	4:26:28 PM	SiCl4 pre valve closed
10/20/2010	4:26:28 PM	SiCl4 post valve closed
10/20/2010	4:26:28 PM	Main Vac valve closed
10/20/2010	4:26:28 PM	Bubbler valve closed
10/20/2010	4:26:28 PM	Bypass valve opened
10/20/2010	4:26:28 PM	Helium MFC set to  0.000000
10/20/2010	4:26:28 PM	H2 MFC set to  0.000000
10/20/2010	4:26:28 PM	BCl3 MFC set to  0.000000
10/20/2010	4:26:28 PM	PHl3 MFC set to  0.000000
10/20/2010	4:26:28 PM	SiCl4 MFC set to  0.000000
10/20/2010	4:26:28 PM	Bypass solenoid MFC set to  0.000000
10/20/2010	4:26:28 PM	Tube furnace set to 0
10/20/2010	4:27:17 PM	Helium valve closed
10/20/2010	4:27:17 PM	H2 valve closed
10/20/2010	4:27:17 PM	BCl3 valve closed
10/20/2010	4:27:17 PM	PH3 valve closed
10/20/2010	4:27:17 PM	SiCl4 pre valve closed
10/20/2010	4:27:17 PM	SiCl4 post valve closed
10/20/2010	4:27:17 PM	Bubbler valve closed
10/20/2010	4:27:17 PM	Main Vac valve opened
10/20/2010	4:27:17 PM	Bypass valve opened
10/20/2010	4:27:17 PM	Helium MFC set to  0.000000
10/20/2010	4:27:17 PM	H2 MFC set to  0.000000
10/20/2010	4:27:17 PM	BCl3 MFC set to  0.000000
10/20/2010	4:27:17 PM	PHl3 MFC set to  0.000000
10/20/2010	4:27:17 PM	SiCl4 MFC set to  0.000000
10/20/2010	4:27:17 PM	Bypass solenoid MFC set to  0.000000
10/20/2010	4:27:17 PM	Tube furnace set to 0
10/20/2010	4:27:17 PM	Run finished at 4:27 PM
10/20/2010	4:27:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/20/2010	4:37:15 PM	Helium valve opened
10/20/2010	4:37:19 PM	Helium MFC set to  100.000000
10/20/2010	4:44:11 PM	Helium valve closed
10/20/2010	4:46:21 PM	Helium valve opened
10/20/2010	4:50:41 PM	Helium valve closed
10/20/2010	4:50:43 PM	Helium MFC set to  0.000000
10/20/2010	4:52:42 PM	Helium valve opened
10/20/2010	4:52:45 PM	Helium MFC set to  100.000000
10/20/2010	4:53:22 PM	Helium valve closed
10/20/2010	4:53:24 PM	Helium MFC set to  0.000000
10/20/2010	4:54:37 PM	Recipe started at 4:54 PM
10/20/2010	4:54:37 PM	Helium valve closed
10/20/2010	4:54:37 PM	BCl3 valve closed
10/20/2010	4:54:37 PM	PH3 valve closed
10/20/2010	4:54:37 PM	SiCl4 pre valve closed
10/20/2010	4:54:37 PM	SiCl4 post valve closed
10/20/2010	4:54:37 PM	Main Vac valve closed
10/20/2010	4:54:37 PM	Bypass valve closed
10/20/2010	4:54:37 PM	Bubbler valve closed
10/20/2010	4:54:37 PM	H2 valve opened
10/20/2010	4:54:37 PM	Helium MFC set to  0.000000
10/20/2010	4:54:37 PM	H2 MFC set to  500.000000
10/20/2010	4:54:37 PM	BCl3 MFC set to  0.000000
10/20/2010	4:54:37 PM	PHl3 MFC set to  0.000000
10/20/2010	4:54:37 PM	SiCl4 MFC set to  0.000000
10/20/2010	4:54:37 PM	Bypass solenoid MFC set to  0.000000
10/20/2010	4:54:37 PM	Tube furnace set to 0
10/20/2010	4:55:54 PM	Helium valve closed
10/20/2010	4:55:54 PM	BCl3 valve closed
10/20/2010	4:55:54 PM	PH3 valve closed
10/20/2010	4:55:54 PM	SiCl4 pre valve closed
10/20/2010	4:55:54 PM	SiCl4 post valve closed
10/20/2010	4:55:54 PM	Main Vac valve closed
10/20/2010	4:55:54 PM	Bypass valve closed
10/20/2010	4:55:54 PM	H2 valve opened
10/20/2010	4:55:54 PM	Bubbler valve opened
10/20/2010	4:55:54 PM	Helium MFC set to  0.000000
10/20/2010	4:55:54 PM	H2 MFC set to  500.000000
10/20/2010	4:55:54 PM	BCl3 MFC set to  0.000000
10/20/2010	4:55:54 PM	PHl3 MFC set to  0.000000
10/20/2010	4:55:54 PM	SiCl4 MFC set to  0.000000
10/20/2010	4:55:54 PM	Bypass solenoid MFC set to  0.000000
10/20/2010	4:55:55 PM	Tube furnace set to 1000
10/20/2010	5:03:22 PM	Helium valve closed
10/20/2010	5:03:22 PM	PH3 valve closed
10/20/2010	5:03:22 PM	Main Vac valve closed
10/20/2010	5:03:22 PM	Bypass valve closed
10/20/2010	5:03:22 PM	H2 valve opened
10/20/2010	5:03:22 PM	BCl3 valve opened
10/20/2010	5:03:22 PM	SiCl4 pre valve opened
10/20/2010	5:03:22 PM	SiCl4 post valve opened
10/20/2010	5:03:22 PM	Bubbler valve opened
10/20/2010	5:03:22 PM	Helium MFC set to  0.000000
10/20/2010	5:03:22 PM	H2 MFC set to  500.000000
10/20/2010	5:03:22 PM	BCl3 MFC set to  10.000000
10/20/2010	5:03:22 PM	PHl3 MFC set to  0.000000
10/20/2010	5:03:22 PM	SiCl4 MFC set to  50.000000
10/20/2010	5:03:22 PM	Bypass solenoid MFC set to  0.000000
10/20/2010	5:03:22 PM	Tube furnace set to 1000
10/20/2010	5:06:33 PM	Helium valve closed
10/20/2010	5:06:33 PM	PH3 valve closed
10/20/2010	5:06:33 PM	Main Vac valve closed
10/20/2010	5:06:33 PM	Bypass valve closed
10/20/2010	5:06:33 PM	H2 valve opened
10/20/2010	5:06:33 PM	BCl3 valve opened
10/20/2010	5:06:33 PM	SiCl4 pre valve opened
10/20/2010	5:06:33 PM	SiCl4 post valve opened
10/20/2010	5:06:33 PM	Bubbler valve opened
10/20/2010	5:06:33 PM	Helium MFC set to  0.000000
10/20/2010	5:06:33 PM	H2 MFC set to  500.000000
10/20/2010	5:06:33 PM	BCl3 MFC set to  10.000000
10/20/2010	5:06:33 PM	PHl3 MFC set to  0.000000
10/20/2010	5:06:33 PM	SiCl4 MFC set to  50.000000
10/20/2010	5:06:33 PM	Bypass solenoid MFC set to  0.000000
10/20/2010	5:06:33 PM	Tube furnace set to 1000
10/20/2010	5:11:33 PM	H2 valve closed
10/20/2010	5:11:33 PM	BCl3 valve closed
10/20/2010	5:11:33 PM	PH3 valve closed
10/20/2010	5:11:33 PM	SiCl4 pre valve closed
10/20/2010	5:11:33 PM	SiCl4 post valve closed
10/20/2010	5:11:33 PM	Main Vac valve closed
10/20/2010	5:11:33 PM	Bypass valve closed
10/20/2010	5:11:33 PM	Helium valve opened
10/20/2010	5:11:33 PM	Bubbler valve opened
10/20/2010	5:11:33 PM	Helium MFC set to  500.000000
10/20/2010	5:11:33 PM	H2 MFC set to  0.000000
10/20/2010	5:11:33 PM	BCl3 MFC set to  0.000000
10/20/2010	5:11:33 PM	PHl3 MFC set to  0.000000
10/20/2010	5:11:33 PM	SiCl4 MFC set to  0.000000
10/20/2010	5:11:33 PM	Bypass solenoid MFC set to  0.000000
10/20/2010	5:11:33 PM	Tube furnace set to 0
10/20/2010	5:31:33 PM	Helium valve closed
10/20/2010	5:31:33 PM	H2 valve closed
10/20/2010	5:31:33 PM	BCl3 valve closed
10/20/2010	5:31:33 PM	PH3 valve closed
10/20/2010	5:31:33 PM	SiCl4 pre valve closed
10/20/2010	5:31:33 PM	SiCl4 post valve closed
10/20/2010	5:31:33 PM	Main Vac valve closed
10/20/2010	5:31:33 PM	Bypass valve closed
10/20/2010	5:31:33 PM	Bubbler valve closed
10/20/2010	5:31:33 PM	Helium MFC set to  0.000000
10/20/2010	5:31:33 PM	H2 MFC set to  0.000000
10/20/2010	5:31:33 PM	BCl3 MFC set to  0.000000
10/20/2010	5:31:33 PM	PHl3 MFC set to  0.000000
10/20/2010	5:31:33 PM	SiCl4 MFC set to  0.000000
10/20/2010	5:31:33 PM	Bypass solenoid MFC set to  0.000000
10/20/2010	5:31:33 PM	Tube furnace set to 0
10/20/2010	5:31:34 PM	Run finished at 5:31 PM
10/20/2010	6:01:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/20/2010	6:01:42 PM	Recipe started at 6:01 PM
10/20/2010	6:01:42 PM	Helium valve closed
10/20/2010	6:01:42 PM	H2 valve closed
10/20/2010	6:01:42 PM	BCl3 valve closed
10/20/2010	6:01:42 PM	PH3 valve closed
10/20/2010	6:01:42 PM	SiCl4 pre valve closed
10/20/2010	6:01:42 PM	SiCl4 post valve closed
10/20/2010	6:01:42 PM	Main Vac valve closed
10/20/2010	6:01:42 PM	Bubbler valve closed
10/20/2010	6:01:42 PM	Bypass valve opened
10/20/2010	6:01:42 PM	Helium MFC set to  0.000000
10/20/2010	6:01:42 PM	H2 MFC set to  0.000000
10/20/2010	6:01:42 PM	BCl3 MFC set to  0.000000
10/20/2010	6:01:42 PM	PHl3 MFC set to  0.000000
10/20/2010	6:01:42 PM	SiCl4 MFC set to  0.000000
10/20/2010	6:01:42 PM	Bypass solenoid MFC set to  0.000000
10/20/2010	6:01:42 PM	Tube furnace set to 0
10/20/2010	6:02:31 PM	Helium valve closed
10/20/2010	6:02:31 PM	H2 valve closed
10/20/2010	6:02:31 PM	BCl3 valve closed
10/20/2010	6:02:31 PM	PH3 valve closed
10/20/2010	6:02:31 PM	SiCl4 pre valve closed
10/20/2010	6:02:31 PM	SiCl4 post valve closed
10/20/2010	6:02:31 PM	Bubbler valve closed
10/20/2010	6:02:31 PM	Main Vac valve opened
10/20/2010	6:02:31 PM	Bypass valve opened
10/20/2010	6:02:31 PM	Helium MFC set to  0.000000
10/20/2010	6:02:31 PM	H2 MFC set to  0.000000
10/20/2010	6:02:31 PM	BCl3 MFC set to  0.000000
10/20/2010	6:02:31 PM	PHl3 MFC set to  0.000000
10/20/2010	6:02:31 PM	SiCl4 MFC set to  0.000000
10/20/2010	6:02:31 PM	Bypass solenoid MFC set to  0.000000
10/20/2010	6:02:31 PM	Tube furnace set to 0
10/20/2010	6:02:31 PM	Run finished at 6:02 PM
10/20/2010	6:02:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/20/2010	7:48:28 PM	Recipe started at 7:48 PM
10/20/2010	7:48:28 PM	Helium valve closed
10/20/2010	7:48:28 PM	BCl3 valve closed
10/20/2010	7:48:28 PM	PH3 valve closed
10/20/2010	7:48:28 PM	SiCl4 pre valve closed
10/20/2010	7:48:28 PM	SiCl4 post valve closed
10/20/2010	7:48:28 PM	Main Vac valve closed
10/20/2010	7:48:28 PM	Bypass valve closed
10/20/2010	7:48:28 PM	Bubbler valve closed
10/20/2010	7:48:28 PM	H2 valve opened
10/20/2010	7:48:28 PM	Helium MFC set to  0.000000
10/20/2010	7:48:28 PM	H2 MFC set to  500.000000
10/20/2010	7:48:28 PM	BCl3 MFC set to  0.000000
10/20/2010	7:48:28 PM	PHl3 MFC set to  0.000000
10/20/2010	7:48:28 PM	SiCl4 MFC set to  0.000000
10/20/2010	7:48:28 PM	Bypass solenoid MFC set to  0.000000
10/20/2010	7:48:28 PM	Tube furnace set to 100
10/20/2010	7:49:47 PM	Helium valve closed
10/20/2010	7:49:47 PM	BCl3 valve closed
10/20/2010	7:49:47 PM	PH3 valve closed
10/20/2010	7:49:47 PM	SiCl4 pre valve closed
10/20/2010	7:49:47 PM	SiCl4 post valve closed
10/20/2010	7:49:47 PM	Main Vac valve closed
10/20/2010	7:49:47 PM	Bypass valve closed
10/20/2010	7:49:47 PM	H2 valve opened
10/20/2010	7:49:47 PM	Bubbler valve opened
10/20/2010	7:49:47 PM	Helium MFC set to  0.000000
10/20/2010	7:49:47 PM	H2 MFC set to  500.000000
10/20/2010	7:49:47 PM	BCl3 MFC set to  0.000000
10/20/2010	7:49:47 PM	PHl3 MFC set to  0.000000
10/20/2010	7:49:47 PM	SiCl4 MFC set to  0.000000
10/20/2010	7:49:47 PM	Bypass solenoid MFC set to  0.000000
10/20/2010	7:49:48 PM	Tube furnace set to 1000
10/20/2010	8:06:08 PM	Helium valve closed
10/20/2010	8:06:08 PM	PH3 valve closed
10/20/2010	8:06:08 PM	Main Vac valve closed
10/20/2010	8:06:08 PM	Bypass valve closed
10/20/2010	8:06:08 PM	H2 valve opened
10/20/2010	8:06:08 PM	BCl3 valve opened
10/20/2010	8:06:08 PM	SiCl4 pre valve opened
10/20/2010	8:06:08 PM	SiCl4 post valve opened
10/20/2010	8:06:08 PM	Bubbler valve opened
10/20/2010	8:06:08 PM	Helium MFC set to  0.000000
10/20/2010	8:06:08 PM	H2 MFC set to  500.000000
10/20/2010	8:06:08 PM	BCl3 MFC set to  10.000000
10/20/2010	8:06:08 PM	PHl3 MFC set to  0.000000
10/20/2010	8:06:08 PM	SiCl4 MFC set to  50.000000
10/20/2010	8:06:08 PM	Bypass solenoid MFC set to  0.000000
10/20/2010	8:06:08 PM	Tube furnace set to 1000
10/20/2010	8:11:08 PM	H2 valve closed
10/20/2010	8:11:08 PM	BCl3 valve closed
10/20/2010	8:11:08 PM	PH3 valve closed
10/20/2010	8:11:08 PM	SiCl4 pre valve closed
10/20/2010	8:11:08 PM	SiCl4 post valve closed
10/20/2010	8:11:08 PM	Main Vac valve closed
10/20/2010	8:11:08 PM	Bypass valve closed
10/20/2010	8:11:08 PM	Helium valve opened
10/20/2010	8:11:08 PM	Bubbler valve opened
10/20/2010	8:11:08 PM	Helium MFC set to  500.000000
10/20/2010	8:11:08 PM	H2 MFC set to  0.000000
10/20/2010	8:11:08 PM	BCl3 MFC set to  0.000000
10/20/2010	8:11:08 PM	PHl3 MFC set to  0.000000
10/20/2010	8:11:08 PM	SiCl4 MFC set to  0.000000
10/20/2010	8:11:08 PM	Bypass solenoid MFC set to  0.000000
10/20/2010	8:11:08 PM	Tube furnace set to 0
10/20/2010	8:31:08 PM	Helium valve closed
10/20/2010	8:31:08 PM	H2 valve closed
10/20/2010	8:31:08 PM	BCl3 valve closed
10/20/2010	8:31:08 PM	PH3 valve closed
10/20/2010	8:31:08 PM	SiCl4 pre valve closed
10/20/2010	8:31:08 PM	SiCl4 post valve closed
10/20/2010	8:31:08 PM	Main Vac valve closed
10/20/2010	8:31:08 PM	Bypass valve closed
10/20/2010	8:31:08 PM	Bubbler valve closed
10/20/2010	8:31:08 PM	Helium MFC set to  0.000000
10/20/2010	8:31:08 PM	H2 MFC set to  0.000000
10/20/2010	8:31:08 PM	BCl3 MFC set to  0.000000
10/20/2010	8:31:08 PM	PHl3 MFC set to  0.000000
10/20/2010	8:31:08 PM	SiCl4 MFC set to  0.000000
10/20/2010	8:31:08 PM	Bypass solenoid MFC set to  0.000000
10/20/2010	8:31:09 PM	Tube furnace set to 0
10/20/2010	8:31:09 PM	Run finished at 8:31 PM
10/20/2010	10:32:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/20/2010	10:32:11 PM	Recipe started at 10:32 PM
10/20/2010	10:32:11 PM	Helium valve closed
10/20/2010	10:32:11 PM	H2 valve closed
10/20/2010	10:32:11 PM	BCl3 valve closed
10/20/2010	10:32:11 PM	PH3 valve closed
10/20/2010	10:32:11 PM	SiCl4 pre valve closed
10/20/2010	10:32:11 PM	SiCl4 post valve closed
10/20/2010	10:32:11 PM	Main Vac valve closed
10/20/2010	10:32:11 PM	Bubbler valve closed
10/20/2010	10:32:11 PM	Bypass valve opened
10/20/2010	10:32:11 PM	Helium MFC set to  0.000000
10/20/2010	10:32:11 PM	H2 MFC set to  0.000000
10/20/2010	10:32:11 PM	BCl3 MFC set to  0.000000
10/20/2010	10:32:11 PM	PHl3 MFC set to  0.000000
10/20/2010	10:32:11 PM	SiCl4 MFC set to  0.000000
10/20/2010	10:32:11 PM	Bypass solenoid MFC set to  0.000000
10/20/2010	10:32:11 PM	Tube furnace set to 0
10/20/2010	10:32:58 PM	Helium valve closed
10/20/2010	10:32:58 PM	H2 valve closed
10/20/2010	10:32:58 PM	BCl3 valve closed
10/20/2010	10:32:58 PM	PH3 valve closed
10/20/2010	10:32:58 PM	SiCl4 pre valve closed
10/20/2010	10:32:58 PM	SiCl4 post valve closed
10/20/2010	10:32:58 PM	Bubbler valve closed
10/20/2010	10:32:58 PM	Main Vac valve opened
10/20/2010	10:32:58 PM	Bypass valve opened
10/20/2010	10:32:58 PM	Helium MFC set to  0.000000
10/20/2010	10:32:58 PM	H2 MFC set to  0.000000
10/20/2010	10:32:58 PM	BCl3 MFC set to  0.000000
10/20/2010	10:32:58 PM	PHl3 MFC set to  0.000000
10/20/2010	10:32:58 PM	SiCl4 MFC set to  0.000000
10/20/2010	10:32:58 PM	Bypass solenoid MFC set to  0.000000
10/20/2010	10:32:58 PM	Tube furnace set to 0
10/20/2010	10:32:58 PM	Run finished at 10:32 PM
10/20/2010	10:32:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
